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TESCOM™ 64-5400 Series Electropolish Pressure Regulator
64-5400 Series high purity pressure reducing regulator provides 316 Stainless Steel with Electropolish, 10 Ra surface finish and Hastelloy® diaphragm design.
The 64-5400 Series offers high flow Cv = 1.0 and inlet pressure of 600 psig / 41.4 bar with outlet pressures up to 150 psig / 10.3 bar. Ideal for us in Bulk Specialty Gas Systems (BSGS), 1/2" point-of-use, tool hookups and gas cabinets.

TESCOM 64 Series Semiconductor Pressure Control Solutions

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TESCOM™ 64-5400 Series Electropolish Pressure Regulator


Pressure Rating
Maximum Inlet Pressure: 600 psig / 41.4 bar
Outlet Pressure Ranges: 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar
Body Material
316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish
Valve Seat
PCTFE or Teflon® PFA
Seat Retainer
Nitronic 60 Stainless Steel
Stem, Seal & Remaining Parts
316 Stainless Steel
Operating Temperature
Teflon® PFA Seat: -40°F to 160°F / -40°C to 71°C
PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Port Size & Type
3/8 Tube Stubs
1/2 Tube Stubs
1/2 Male Swivel
1/2 Female Swivel
3/8 Compression Fitting
1/2 Compression Fitting
Flow Capacity
Cv = 1.0
Load Type
Weight (without gauges)
3.5 lbs / 1.6 kg
Additional Information
For custom modifications or a complete system solution, please contact your local sales office.


  • Compact, hand-loaded and pressure reducing
  • Low internal volume
  • Metal-to-metal diaphragm to body seal for high leak integrity
  • 1.3 Cv available upon request


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